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OF213 Optoelectronic Chip Inspection and Sorting System

The OF213 is high resolution single-sided inspection system with ultrasonic pick function on the back. The OF213 provides high throughput to meet mass production.

Key Features

  • Single direction vision inspection system for VCSEL/PD chips with ultrasonic pick function
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  • High resolution optics
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  • A robust platform enables high throughput
  • Detection of P/N pattern and multilayer defects
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