Semicondutor

8"/ 12" Wafer Inspection System

The SW231 is an ideal automated optical inspection machine for the providers of advanced packaging, design, and test services in the mid-end process. Equipped with T1100, the SW231 implements the full automation operation and high-volume production environments.

Key Features

  • 3D resolution down to 0.08um
    •
  • Macro/micro/review multiple magnifications for 2D inspection
    •
  • Detection of 21 chip pattern defects
  • Detection of 14 probing mark defects
    •
  • Detection of 17 bump defects
    •
  • Darkfield inspection technique
    •
  • RDL inspection, linewidth and lines pace metrology
    •
  • Off-line review inspection system and Off-line recipe management system
    •
  • Equipped with T1100 for full automation operation
    •