Semicondutor

SW221 6"/ 8" Wafer Inspection System

SW221 is a high resolution ADI which delivers superb inspection and metrology capabilities that fit right into the most advanced front-end, back-end, R & D and production environment.

Key Features

  • High resolution ADI/AEI
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  • Macro inspection of arrow shadow, residual photoresist and abnormal exposure
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  • Micro inspection of abnormal cell
  • Metrology solution for CDAA, CD bar, mask offset and version check
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