Semicondutor

TP930 Semi-automatic Wafer 2D Inspection System

The TP930 is desktop semi-automatic machine for wafer defect detection and 2D inspection system from RD to the high production volume environment.

Key Features

  • Resolution down to 0.5um
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  • Precise alignment function
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  • Detection of 21 chip pattern defects
  • Detection of 18 sawn line defects
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  • Detection of 14 probing mark defects
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  • Support non-patterned wafer inspection
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  • Fast, easy and intuitive setup
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