LED & SILICON CHIP

LR220 LED Chip Inspection System

The LR220 series is 2D inspection system for LED and silicon sensor chips.

Key Features

  • 2/4 inch and 4/6 inch wafer handling capability
    •
  • Support color inspection
    •
  • Applied in normal, flip chip and vertical products in one system
  • Maximum size up to 180mil
    •
  • Detection of surface, bond pad and scribe line defects
    •
  • A market-approved inspection system
    •
  • in Taiwan for 10 years
    •